2.1 Introduction2.2 FinFET—Early Vertical Memories2.3 Double-Gate and Tri-Gate Flash2.4 Thin-Film Transistor (TFT) Nonvolatile Memory with Polysilicon Channels2.5 Double-Gate Vertical Channel Flash Memory with Engineered Tunnel Layer2.6 Stacked Gated Twin-Bit (SGTB) CT Flash2.7 Crystalline Silicon and Epitaxial Stacked LayersReferences