Chapter 1 3D INTEGRATION TECHNOLOGY - INTRODUCTION AND OVERVIEW

Chuan Seng Tan

Nanyang Technological University

Steven J. Koester

University of Minnesota

Kuan-Neng Chen

National Chiao Tung University

1.1 INTRODUCTION

The past decade has seen three-dimensional (3D) integration technology mature rapidly from a hypothetical concept to a technology that is on the cusp widespread commercial implementation. This rapid trend towards acceptance of 3D integration has been both a result of key demonstrations of the technical feasibility of the process, as well as a growing consensus that 3D integration will be necessary to continue current computational system performance trends. 3D technology also offers an abundance of opportunities for new ...

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