Nanomanufacturing/Nanotechnology
Abstract
This chapter provides comprehensive knowledge regarding the fabrication of nanoproducts and element of micro-electromechanical systems using various techniques and processes. Both well-established techniques, such as nanomachining (ultra-precision) and new trends in improving nanoprocesses taking into account AFM, laser beam machining, electron beam machining processes are overviewed. The background of nanomachining processes, including typical machining operations such as turning, milling and grinding and different construction materials (metallic and nonmetallic), is outlined. The physical mechanisms responsible for the transition from brittle to ductile regime machining are explained. ...
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