Advanced Nanoelectronics

12	Top-Down Fabrication of ZnO NWFETs Suhana Mohamed Sultan, Peter Ashburn, and Harold M. H. Chong

CONTENTS

12.1    Introduction

12.1.1  ZnO Material Properties

12.1.2  ZnO: From Thin Film to Nanowires

12.1.3  Concept of Nanowire TFTs

12.2    Thin Film Growth and Properties

12.3    ZnO Nanowire Fabrication Process

12.3.1  Bottom-Up Process

12.3.2  Top-Down Process

12.3.3  Benchmarking ZnO NWFETs

12.4    Top-Down Fabrication of ZnO NWFET

12.4.1  Fabrication Process

12.4.2  Etching

12.4.3  Raman Mapping

12.4.4  Contact Annealing

12.4.5  Field-Effect Characteristics

12.4.6  Scalability and Reproducibility of Top-Down Fabrication

12.4.7  Comparison with Theory

12.4.8  Conclusions

Acknowledgments

References

12.1    INTRODUCTION

Currently, ZnO ...