Nanowire phase change memory (PCM) technologies: principles, fabrication and characterization techniques
M. Longo, National Research Council, Italy
Abstract:
This chapter reviews the various strategies for scaling down phase change materials to improve device performance. It reviews the advantages of phase change nanowires (PC-NWs), top-down and bottom-up fabrication processes and characterisation techniques; technological aspects are also considered. Special focus is placed on the self-assembly of NWs by the vapour-liquid-solid mechanisms, including metalorganic chemical vapour deposition. The compositional and structural analysis of NWs is reviewed.
Key words
nanowires; 1D structures; phase change memory; chalcogenide materials; nanoscaling; ...
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