Nanowire phase change memory (PCM) technologies: principles, fabrication and characterization techniques

M. Longo,    National Research Council, Italy


This chapter reviews the various strategies for scaling down phase change materials to improve device performance. It reviews the advantages of phase change nanowires (PC-NWs), top-down and bottom-up fabrication processes and characterisation techniques; technological aspects are also considered. Special focus is placed on the self-assembly of NWs by the vapour-liquid-solid mechanisms, including metalorganic chemical vapour deposition. The compositional and structural analysis of NWs is reviewed.

Key words

nanowires; 1D structures; phase change memory; chalcogenide materials; nanoscaling; ...

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