10
Fundamentals of Integrated Circuit Fabrication
Outline
10-2 Fundamentals of Integrated Circuits
10-3 Types of Integrated Circuits
10-4 Advantages and Disadvantages of Integrated Circuits
10-6 Crystal Growth and Wafer Preparation
10-9 Photolithography for Pattern Transfer
10-12 Ion Implantation for Doping
10-13 Metallization for Interconnection
10-17 Fabrication Steps for Different Circuits
Objectives
This chapter deals with the fundamentals of integrated circuit fabrication. In the field of ...
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