Biomaterials for MEMS

Preface

Microelectromechanical Systems (MEMS) technology has been developed for more

than three decades. MEMS applications have proliferated that cover many indus-

try sectors, including automotive, aerospace and consumer clectronics. MEMS

for biological applications, or BioMEMS, and not received much attention until

perhaps mid-1990s. It has been extremely challenging for engineers and scientists

to cross discipline boundaries, as such, many existing relevant textbooks on MEMS

focus on introducing MEMS technologies to non-MEMS researchers.

In recent years, research efforts have been made in finding biomedical applica-

tions for MEMS devices. As a result, MEMS engineers are facing new challenges in

biomaterial selections that are suitable for miniaturization. Many research papers

demonstrated micromachining of particular biomaterials and application of those

biomaterials in microdevices. However, there is insufficient organized effort to

systematically introduce biomaterials to MEMS researchers.

This book intends to serve as a guide for practicing engineers, researchers

and students interested in MEMS devices using biomaterials and biomedical

applications using these devices, This book highlights important features and

issues of biomaterials that have been used in the MEMS and biomedical areas. The

materials in this book come from earlier research papers and detailed references

are included. The contents of this book provide an overview in various aspects to

build up understanding in this multidisciplinary subject. This book only serves as

an introduction and does not intentionally leave out other relevant work.

We are grateful to all the contributors and staff involved in the book’s editing

process.

Editors

M. Chiao and J.-C. Chiao

Biomaterials for MEMS, Edited b y M. Chiao and J.-C. Chiao

Copyright © 2011 by Pan Stanford Publishing Pte. Ltd.

www.panstanford.com

978-981-4241-46-5

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