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Ceramic Thick Films for MEMS and Microdevices by Robert A. Dorey

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Chapter 6. Houston, we have a problem
How to fix it when it all goes wrong

Chapter Outline

6.1 Introduction146
6.2 Integration147
6.2.1 Issue: Poor-quality electrode under PZT films147
6.2.1.1 Circumstances147
6.2.1.2 Investigation147
6.2.1.3 Solution149
6.2.2 Issue: Catastrophic loss of film and substrate149
6.2.2.1 Circumstances149
6.2.2.2 Investigation149
6.2.2.3 Solution150
6.3 Cracking and Surface Finish151
6.3.1 Issue: Cracking of thick film151
6.3.1.1 Circumstances151
6.3.1.2 Investigation151
6.3.1.3 Solution152
6.3.2 Issue: Uneven surface finish on dip-coated porous lanthanum strontium manganite (LSMO) films152
6.3.2.1 Circumstances152
6.3.2.2 Investigation52
6.3.2.3 Solution153
6.3.3 Issue: Uneven surface finish on a screen-printed film153
6.3.3.1 Circumstances ...

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