Ceramic Thick Films for MEMS and Microdevices

Chapter 6. Houston, we have a problem

How to fix it when it all goes wrong

Chapter Outline

6.1 Introduction146

6.2 Integration147

6.2.1 Issue: Poor-quality electrode under PZT films147

6.2.1.1 Circumstances147

6.2.1.2 Investigation147

6.2.1.3 Solution149

6.2.2 Issue: Catastrophic loss of film and substrate149

6.2.2.1 Circumstances149

6.2.2.2 Investigation149

6.2.2.3 Solution150

6.3 Cracking and Surface Finish151

6.3.1 Issue: Cracking of thick film151

6.3.1.1 Circumstances151

6.3.1.2 Investigation151

6.3.1.3 Solution152

6.3.2 Issue: Uneven surface finish on dip-coated porous lanthanum strontium manganite (LSMO) films152

6.3.2.1 Circumstances152

6.3.2.2 Investigation52

6.3.2.3 Solution153

6.3.3 Issue: Uneven surface finish on a screen-printed film153

6.3.3.1 Circumstances ...