September 2010
Intermediate to advanced
226 pages
6h 21m
English
Appendix G
Formula Derivation in Chapter 10
The derivation of Eq. (10.18) is as follows:
(G.1) 
For the OPC optimization in the first type of optical lithography system, all the entries of 
have real values. In addition, according to Eq. 10.7, 
, where 
. Thus,
(G.2) 
The derivation of Eq. (10.19) is as follows:
(G.3) 
Therefore,
(G.4) 
The derivation of Eq. (10.20) is as follows:
(G.5) 
Therefore,
(G.6) 
The derivation of Eq. (10.21) is as follows:
(G.7)
Therefore,
(G.8)
