Gas-Phase Cleaning for Removal of Surface Contaminants
Rajiv Kohli, The Aerospace Corporation, Houston, TX, United States
Abstract
This chapter provides an overview of gas-phase cleaning for removal of surface contaminants. The absence of surface tension and very low viscosity allow gases to penetrate tight spaces and complex geometries for effective decontamination. The wide range of gas chemistries and process variables such as temperature, pressure, concentration, and flow rate enable effective and efficient removal of a variety of contaminants from various materials. Discussed are selected applications of gas-phase treatment for deposition tool chamber cleaning, dry etching, sterilization, and decontamination of nuclear materials ...
Get Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning now with the O’Reilly learning platform.
O’Reilly members experience books, live events, courses curated by job role, and more from O’Reilly and nearly 200 top publishers.
