November 2016
Intermediate to advanced
212 pages
6h 54m
English
book
Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning
by Rajiv Kohli, Kashmiri L. Mittal
Content preview from Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning
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Chapter 2
Gas-Phase Cleaning for Removal of Surface Contaminants
Rajiv Kohli, The Aerospace Corporation, Houston, TX, United States
Abstract
This chapter provides an overview of gas-phase cleaning for removal of surface contaminants. The absence of surface tension and very low viscosity allow gases to penetrate tight spaces and complex geometries for effective decontamination. The wide range of gas chemistries and process variables such as temperature, pressure, concentration, and flow rate enable effective and efficient removal of a variety of contaminants from various materials. Discussed are selected applications of gas-phase treatment for deposition tool chamber cleaning, dry etching, sterilization, and decontamination of nuclear materials ...
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