Chapter 3

Laser-Induced Spray Jet Cleaning

Changho Seo and Dongsik Kim,    POSTECH, Pohang, Republic of Korea

Abstract

In this review, we introduce a recently developed cleaning technique to remove nanoscale particles as small as ~10 nm. The process utilizes a laser-induced speed spray jet. In the process cycle, optical breakdown of a microliquid droplet with pulsed laser produces a high-speed spray jet composed of atomized liquid droplets. The collision of the spray jet with a solid surface can remove the nanoscale particles. The mechanism of spray jet generation in laser-induced breakdown of a droplet, as well as those of particle removal by spray jets, are summarized with discussion on the potential applications of the technique. The effect ...

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