Chapter 7

Micro- and Nanomachining

M.J. Jackson

Center for Advanced Manufacturing, MET, College of Technology, Purdue University,West Lafayette, IN, USA

Abstract

Advances in miniaturization have led to the understanding and development of small scale components that require advanced machining techniques in order to achieve the tolerances and feature sizes required at the micro and nanoscales. The chapter focuses on general machining effects, size effects, nanomachining processes, and a comparison between machining at the micro and nanoscales. An explanation of how size effects at the microscale affects the removal of material and its implications on shaping material at ever diminishing scales is provided.

7.1 Introduction

Recent advances in miniaturization ...

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