Emerging Nanotechnologies for Manufacturing

Chapter 12

Nanocrystalline Diamond for RF-MEMS Applications

S. Balachandran¹, T. Weller¹, A. Kumar², S. Jeedigunta¹, H. Gomez², J. Kusterer³ and E. Kohn³

¹Department of Electrical Engineering, University of South Florida, Tampa, FL, USA

²Department of Mechanical Engineering, University of South Florida, Tampa, FL, USA

³Institute of Electron Devices and Circuits, University of Ulm, Ulm, Germany

Abstract

This article presents thermally actuated nanocrystalline diamond bridges for microwave and high power RF applications. The growth process along with the seeding technique for generating the diamond films has been discussed. RF applications which include mechanical resonators and electrostatically actuated switches demonstrated by other researchers ...