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Fundamental Principles of Engineering Nanometrology, 2nd Edition by Richard Leach

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Chapter 3

Precision Measurement Instrumentation – Some Design Principles

Richard Leach

This chapter introduces many of the concepts necessary for the precision design of measuring instruments. The geometry of the various structural elements of an instrument is discussed along with principles of symmetry. Kinematic design is covered in detail along with examples of fully constrained systems (the Kelvin clamps) and controlled degree of freedom motion devices. Motion and dynamics are addressed and the Abbe principle is covered in detail. Elastic compression and the different forms of force loop on an instrument (structural, thermal and metrological) are discussed along with methods to minimise the effects of thermal and mechanical error sources. ...

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