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Fundamental Principles of Engineering Nanometrology, 2nd Edition by Richard Leach

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Chapter 6

Surface Topography Measurement Instrumentation

Richard Leach

This chapter focuses on the measurement of surface topography. The chapter begins with an introduction to the subject and presents a short history. Profile and areal measurements are presented and their pros and cons discussed. Different methods for measuring surface topography are then addressed including stylus methods, triangulation, confocal, chromatic confocal, point autofocus, phase stepping interferometry, coherence scanning interferometry, digital holographic microscopy and scattering instruments. The generic and specific limitations of the optical methods are covered in detail. Calibration and traceability form the last part of the chapter with uncertainty, material ...

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