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Fundamental Principles of Engineering Nanometrology, 2nd Edition by Richard Leach

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Chapter 7

Scanning Probe and Particle Beam Microscopy

Alexandre Cuenat and Richard Leach,    National Physical Laboratory

This chapter introduces scanning probe and particle beam measurement techniques. After a short introduction to scanning probe microscopy, the most popular techniques are presented in detail: scanning tunnelling microscopy and atomic force microscopy. Noise sources and imaging artefacts in atomic force microscopy are addressed, followed by traceability and calibration techniques. Force measurement with atomic force microscopy is then discussed and methods for cantilever calibration. Use of atomic force microscopy for measuring nanoparticles is covered along with other modes of probe microscopy. Electron microscopy is discussed ...

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