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Fundamental Principles of Engineering Nanometrology, 2nd Edition by Richard Leach

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Chapter 8

Surface Topography Characterisation

Richard Leach

This chapter discusses the field of surface topography characterisation, i.e. the analysis of the measurement data from surface topography measuring instrumentation. The field is introduced with a brief history. Profile and areal characterisation are both covered in detail including the basic concepts, filtering methods and surface texture parameters. In the areal case, both field and feature parameters are discussed, along with fractal methods. The still-evolving international specification standards infrastructure is covered in detail.

Keywords

Surface Topography Characterisation; Profile Characterisation; Areal Characterisation; Filtering; Surface Texture Parameters; Field Parameters; ...

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