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Fundamental Principles of Engineering Nanometrology, 2nd Edition by Richard Leach

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Chapter 9

Coordinate Metrology

David Flack, James Claverley and Richard Leach,    National Physical Laboratory

This chapter discusses coordinate metrology, both macro-scale and micro-scale. Co-ordinate measuring machines, both mechanical and optical are discussed. Different CMM probing systems are addressed along with CMM software and error sources. CMM calibration, performance verification and traceability are also discussed, along with the latest specification standards in this area, and the difference between prismatic and freeform measurements. Micro-CMMs are addressed next: micro-CMM types, probing systems, performance verification and calibration.

Keywords

Coordinate Metrology; Coordinate Measuring Machines; Performance Verification; Micro-CMMs ...

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