University of Seville
University of Seville
Polytechnic University of Catalonia
Polytechnic University of Catalonia
Ecole Polytechnique Fédérale de Lausanne
Ecole Polytechnique Fédérale de Lausanne
University of Western Australia
University of Western Australia
13.2 Sensing and Measuring Principles
Capacitive Sensing • Resistive Sensing • Piezoelectric Sensing • Thermal Transducers • Optical Sensors • Magnetic Sensors
13.3 MEMS Actuation Principles
Introduction • Electrostatic Actuation • Thermal Actuation • Piezoelectric Actuation • Magnetic Actuation
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