Graphene, Carbon Nanotubes, and Nanostructures

6	Aligned Carbon Nanotubes for Interconnect Application Yang Chai, Minghui Sun, Zhiyong Xiao, Yuan Li, Min Zhang and Philip C.H. Chan

CONTENTS

6.1    Introduction

6.2    Controlled Growth of Aligned Cnts

6.2.1    Vertically Aligned CNTs

6.2.2    Horizontally Aligned CNTs

6.3    Integration Schemes with IC Technology

6.3.1    Integration Schemes

6.3.2    Density Enhancement

6.3.3    Interfacial Contact

6.4    Electrical Characterization

6.4.1    DC Characterization

6.4.2    RF Characterization

6.5    Electromigration Characterization

6.5.1    Electrical Breakdown of CNT

6.5.2    Electromigration of Carbon-Based Interconnect

6.6    Conclusions

References

6.1    INTRODUCTION

The complex interconnects link the electronic components in the very ...