Graphene, Carbon Nanotubes, and Nanostructures

7	Monolithic Integration of Carbon Nanotubes and CMOS Huikai Xie, Ying Zhou, Jason Johnson, and Ant Ural

CONTENTS

7.1    Introduction

7.1.1    Carbon Nanotube Synthesis

7.1.2    CMOS-CNT Integration Challenges and Discussion

7.2    CNT Synthesis by Localized Resistive Heating on Mock-CMOS

7.2.1    Microheater Design

7.2.2    Device Fabrication and Microheater Characterization

7.2.2.1    Device Fabrication

7.2.2.2    Microheater Characterization

7.2.3    Room Temperature Carbon Nanotube Synthesis

7.3    Maskless Post-CMOS-CNT Synthesis on Foundry CMOS

7.3.1    Integration Principles and Device Design

7.3.2    Device Fabrication and Characterization

7.3.3    On-Chip Synthesis of Carbon Nanotubes

7.3.4    Characterization of Carbon Nanotubes ...