CHAPTER 23

Optical MEMS Using Commercial Foundries

Deepak Uttamchandani*,     Department of Electronic & Electrical Engineering, University of Strathclyde, Glasgow, Scotland

1 INTRODUCTION

Microelectromechanical systems (MEMS) describes the technology behind the realization of microsensors, microactuators, and complete microsystems with assemblies of moving parts whose dimensions range from around 1 μm to 1000 μm. The origin of this technology lies in the world of silicon microelectronics [1], and many of the design and microfabrication tools and processes used in MEMS technology are still very similar to those used in silicon microfabrication. The term “micromachining” is used to describe the steps involved in the fabrication of a MEMS device. ...

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