Reliability of RF MEMS
I. De Wolf, P. Czarnecki, J. De Coster, O.V. Pedreira, X. Rottenberg and S. Sangameswaran, imec, Belgium
Abstract:
After a brief overview of possible failure mechanisms and failure defects that can occur in radio frequency microelectromechanical systems (RF MEMS), this chapter focuses on three specific reliability issues: charging, because it remains the most important problem for capacitive RF MEMS; electrostatic discharge, because it is less known as a possible failure cause for MEMS; and package hermeticity, because this is an often underestimated problem for RF MEMS.
Key words
reliability
failure mechanisms
MEMS
RF MEMS
switches
charging
ESD
hermeticity
10.1 Introduction
Microelectromechanical systems ...
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