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Handbook of Optical Metrology, 2nd Edition

Book Description

Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text:

  • Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements
  • Addresses interferometry, holography, and speckle methods and applications
  • Explains Moiré metrology and the optical heterodyne measurement method
  • Delves into the specifics of diffraction, scattering, polarization, and near-field optics
  • Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes

This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters—nearly 100 pages—on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.

Table of Contents

  1. Cover
  2. Title Page
  3. Copyright Page
  4. Table of Contents
  5. Preface to the Second Edition
  6. Preface to the First Edition
  7. Contributors
  8. SECTION I Fundamentals of Optical Elements and Devices
  9. Chapter 1 Light Sources
  10. Chapter 2 Lenses, Prisms, and Mirrors
  11. Chapter 3 Optoelectronic Sensors
  12. Chapter 4 Optical Devices and Optomechanical Elements
  13. SECTION II Fundamentals of Principles and Techniques for Metrology
  14. Chapter 5 Propagation of Light
  15. Chapter 6 Interferometry
  16. Chapter 7 Holography
  17. Chapter 8 Speckle Methods and Applications
  18. Chapter 9 Moiré Metrology
  19. Chapter 10 Optical Heterodyne Measurement Method
  20. Chapter 11 Diffraction
  21. Chapter 12 Light Scattering
  22. Chapter 13 Polarization
  23. Chapter 14 Near-Field Optics
  24. SECTION III Practical Applications
  25. Chapter 15 Length and Size
  26. Chapter 16 Displacement
  27. Chapter 17 Straightness and Alignment
  28. Chapter 18 Flatness
  29. Chapter 19 Surface Profilometry
  30. Chapter 20 Three-Dimensional Shape Measurement
  31. Chapter 21 Fringe Analysis
  32. Chapter 22 Photogrammetry
  33. Chapter 23 Optical Methods in Solid Mechanics
  34. Chapter 24 Optical Methods in Flow Measurement
  35. Chapter 25 Polarimetry
  36. Chapter 26 Birefringence Measurement
  37. Chapter 27 Ellipsometry
  38. Chapter 28 Optical Thin Film and Coatings
  39. Chapter 29 Film Surface and Thickness Profilometry
  40. Chapter 30 Optical Coherence Tomography for Industrial Applications
  41. Chapter 31 Interference Microscopy for Surface Structure Analysis
  42. Chapter 32 Noncontact Dimensional and Profile Metrology by Video Measurement
  43. Chapter 33 Optical Metrology in Manufacturing Technology
  44. Chapter 34 On-Machine Measurements
  45. Index