Book description
Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text:
- Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements
- Addresses interferometry, holography, and speckle methods and applications
- Explains Moiré metrology and the optical heterodyne measurement method
- Delves into the specifics of diffraction, scattering, polarization, and near-field optics
- Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes
This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters—nearly 100 pages—on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.
Table of contents
- Cover
- Title Page
- Copyright Page
- Table of Contents
- Preface to the Second Edition
- Preface to the First Edition
- Contributors
- SECTION I Fundamentals of Optical Elements and Devices
- Chapter 1 Light Sources
- Chapter 2 Lenses, Prisms, and Mirrors
- Chapter 3 Optoelectronic Sensors
- Chapter 4 Optical Devices and Optomechanical Elements
- SECTION II Fundamentals of Principles and Techniques for Metrology
- Chapter 5 Propagation of Light
- Chapter 6 Interferometry
- Chapter 7 Holography
- Chapter 8 Speckle Methods and Applications
- Chapter 9 Moiré Metrology
- Chapter 10 Optical Heterodyne Measurement Method
- Chapter 11 Diffraction
- Chapter 12 Light Scattering
- Chapter 13 Polarization
- Chapter 14 Near-Field Optics
- SECTION III Practical Applications
- Chapter 15 Length and Size
- Chapter 16 Displacement
- Chapter 17 Straightness and Alignment
- Chapter 18 Flatness
- Chapter 19 Surface Profilometry
- Chapter 20 Three-Dimensional Shape Measurement
- Chapter 21 Fringe Analysis
- Chapter 22 Photogrammetry
- Chapter 23 Optical Methods in Solid Mechanics
- Chapter 24 Optical Methods in Flow Measurement
- Chapter 25 Polarimetry
- Chapter 26 Birefringence Measurement
- Chapter 27 Ellipsometry
- Chapter 28 Optical Thin Film and Coatings
- Chapter 29 Film Surface and Thickness Profilometry
- Chapter 30 Optical Coherence Tomography for Industrial Applications
- Chapter 31 Interference Microscopy for Surface Structure Analysis
- Chapter 32 Noncontact Dimensional and Profile Metrology by Video Measurement
- Chapter 33 Optical Metrology in Manufacturing Technology
- Chapter 34 On-Machine Measurements
- Index
Product information
- Title: Handbook of Optical Metrology, 2nd Edition
- Author(s):
- Release date: July 2017
- Publisher(s): CRC Press
- ISBN: 9781351831840
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