Handbook of Optical Metrology, 2nd Edition

9	Moiré Metrology
Lianhua Jin and Toru Yoshizawa

CONTENTS

9.1    Introduction

9.2    In-Plane Moiré Method and Measurement of Strain

9.2.1    Pattern Formation of In-Plane Moiré

9.2.2    Application to Strain Measurement

9.2.2.1    Linear Strain Measurement

9.2.2.2    Shear Strain Measurement

9.3    Out-of-Plane Moiré Method and Profilometry

9.3.1    Shadow Moiré and Contour

9.3.2    Intensity of Shadow Moiré Pattern

9.3.3    Application to 3D Profile Measurement

9.3.3.1    Phase-Shifting Method

9.3.3.2    Frequency Sweeping Method

9.3.4    Projection Moiré

9.4    Reflection Moiré

9.5    Diffraction Grating, Interference Moiré, and Application

9.6    Recent Topics

9.6.1    Development in Shape Measurement

9.6.2    High-Speed Measurement ...