CONTENTS
18.2 Interferometric Flatness Measurements
18.2.1.1 Principle of Operation of a Phase-Shifting Fizeau Interferometer
18.2.1.2 Methods to Determine the Surface Profile of a Reference Flat
18.2.1.3 Error Sources in a Phase-Shifting Fizeau Interferometer
18.2.1.4 Fizeau Interferometer in Practical Applications
18.2.2 Oblique Incidence Interferometer
18.3 Flatness Measurement Using Angle Sensors
18.3.1 Contact-Type Flatness Measurement System Using Angle Sensors
18.3.2 Noncontact-Type Flatness Measurement System Using Angle Sensors
Get Handbook of Optical Metrology, 2nd Edition now with the O’Reilly learning platform.
O’Reilly members experience books, live events, courses curated by job role, and more from O’Reilly and nearly 200 top publishers.
