Handbook of Optical Metrology, 2nd Edition

27	Ellipsometry
Hiroyuki Fujiwara

CONTENTS

27.1  Principles of Ellipsometry

27.2  Ellipsometry Measurement

27.3  Optical Model

27.4  Dielectric Function

27.5  Data Analysis Examples

References

During the 1990s, ellipsometry technology developed rapidly due to rapid advances in computer technology that allowed the automation of ellipsometry instruments as well as ellipsometry data analyses. As a result, the application area of the ellipsometry technique has expanded drastically, and now ellipsometry is applied to wide research areas from semiconductors to organic materials [1]. Nevertheless, principles of ellipsometry are often said to be difficult because the meaning of (ψ, Δ) obtained from ellipsometry measurements is not straightforward. ...