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Film Surface and Thickness Profilometry
29.2 Profiling of a Thick Transparent Film by White-Light Interferometry
29.2.1 White-Light Interferometry
29.2.2 KF Algorithm
126.96.36.199 Calculation Procedure
2.3 Film Profiler with the KF Algorithm
29.2.4 Range of Measurable Film Thickness
29.2.5 Examples of Measurements
188.8.131.52 Steps in Film Thickness
184.108.40.206 Resist Film with an Unknown Refractive Index
220.127.116.11 Repeatability of Measurement
29.3 Profiling of a Thin Transparent Film
29.3.1 Measurement of an Oxide Thin Film Step
29.3.2 Measurement of CMP Samples
29.4 Film Thickness Profiling by Pseudo-Transmission Interferometry
29.4.1 Principle of the TF Method ...