Handbook of Optical Metrology, 2nd Edition

29	Film Surface and Thickness Profilometry
Katsuichi Kitagawa

CONTENTS

29.1  Introduction

29.2  Profiling of a Thick Transparent Film by White-Light Interferometry

29.2.1  White-Light Interferometry

29.2.2  KF Algorithm

29.2.2.1  Interferogram

29.2.2.2  Calculation Procedure

2.3  Film Profiler with the KF Algorithm

29.2.4  Range of Measurable Film Thickness

29.2.5  Examples of Measurements

29.2.5.1  Steps in Film Thickness

29.2.5.2  Resist Film with an Unknown Refractive Index

29.2.5.3  Repeatability of Measurement

29.3  Profiling of a Thin Transparent Film

29.3.1  Measurement of an Oxide Thin Film Step

29.3.2  Measurement of CMP Samples

29.4  Film Thickness Profiling by Pseudo-Transmission Interferometry

29.4.1  Principle of the TF Method ...