Handbook of Optical Metrology, 2nd Edition

32	Noncontact Dimensional and Profile Metrology by Video Measurement
Hiroo Tsumuraya and Shuichi Sakai

CONTENTS

32.1  Introduction: Background of Expansion of Metrology Applications by Video Measuring Machine

32.2  Features of Video Measuring Machines

32.3  Basic Structure of Video Measuring Machines

32.3.1  Structure

32.3.2  Coordinate System in Video Measurement

32.4  Optics of Video Measuring Machines

32.4.1  Performance of Optical Systems

32.4.1.1  Distortion

32.4.1.2  Telecentric Optics

32.4.2  Variable Magnification Optics

32.4.3  Illumination Units

32.4.3.1  Diascopic (Back Light/Contour) Illuminator

32.4.3.2  Coaxial Episcopic (Top Light/Incident) Illumination

32.4.3.3  Oblique Illumination

32.5  Image Processor Unit

32.5.1  Edge ...