Handbook of Optical Metrology, 2nd Edition

34	On-Machine Measurements
Takashi Nomura and Kazuhide Kamiya

CONTENTS

34.1  Introduction

34.2  Zone-Plate Interferometer

34.2.1  Zone-Plate Interferometer of A-Type

34.2.2  Zone-Plate Interferometer of B-Type

34.2.3  Zone-Plate Interferometer of C-Type

34.3  Lateral-Shearing Interferometer

References

34.1    INTRODUCTION

Precision mirrors for optical instruments are manufactured by grinding, polishing, or cutting substrates. To manufacture the mirrors with higher precision shape, many cycles of measurements and corrections by the polishing or cutting are repeated in the manufacturing process. The manufacturing time is, therefore, long. And furthermore, the setting error of the mirrors is caused by attaching and detaching the mirrors. ...