References

1. K.E. Petersen, Silicon as a Mechanical Material Proc. of the IEEE 70 1982, 420-457

2. J.H. Hobstetter, Mechanical properties of semiconductors, in: Properties of Crystalline Solids, ASTM Special Technical Publication 283, ASTM, Philadelphia, PA, 1960, p. 40.

3. J.C. Greenwood, Ethylene diamine-catechol-water mixture shows preferential etching of p-n junctions J. Electrochem. Society 116 1969, 1325-

4. J.B. Price, Anisotropic etching of silicon with potassium hydroxide-waterisopropyl alcohol, in: H.R. Huff, R.R. Burgess (Eds.) Semiconductor Silicon 1973, The Electrochemical Chemical Society Softbound Symposium Ser., Princeton, NJ, 1973, p. 339.

5. W.G. Wolber, K.D. Wise, Sensor development in the microcomputer age IEEE Trans. ...

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