Chapter Four. Oxygen in Silicon
Single crystal (SC) silicon is one of the chemically purest technical materials used in large quantities. However, in spite of the high purity, there are still trace levels of other elements present in SC silicon. A common additional element, besides doping elements, is oxygen.
Oxygen is incorporated to SC silicon during crystal growth. In this respect, there is a fundamental difference between Czochralski (CZ) and float zone (FZ) crystals. Oxygen is accumulating to CZ silicon, because molten silicon dissolves oxygen from silica crucibles used in the growth process. If it is necessary, reduction of inherent oxygen concentration is possible by using magnetic CZ process. FZ silicon appears in lower oxygen concentration, ...
Get Handbook of Silicon Based MEMS Materials and Technologies now with the O’Reilly learning platform.
O’Reilly members experience books, live events, courses curated by job role, and more from O’Reilly and nearly 200 top publishers.
