References
1. Crippa D., Rode D., Masi M., Silicon Epitaxy, Semiconductors and semimetals Vol. 72 2001 Academic Press
2. H.C. Theurer, J. Electrochem. Soc. 108 (1961) 649. 1.
3. D.J. Meyer, Proceedings of the International Symposium on ULSI Process Integration IV, The Electrochemical Society, ISBN 1-56677-464-0, 2005, pp. 81–96.
4. D.J. Meyer, M. Hawkins, The deposition of in-situ doped polysilicon in a single wafer reactor, in: 180th Meeting of the Electrochemical Society, Phoenix, Arizona, 1991.
5. D.J. Meyer, J. Italiano, Productive single wafer Si1−xGex processing, in: 196th Meeting of the Electrochemical Society, Honolulu, Hawaii, 1999.
6. P.J. French Lecture Notes in Computer Science, vol. 4017, ISBN 978-3-540-36410-8, 2006, pp. ...
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