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Handbook of Silicon Based MEMS Materials and Technologies by Teruaki Motooka, Ari Lehto, Markku Tilli, Veikko Lindroos

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11.2.4. Dislocations in Silicon: Core Defects

The dislocation core can hardly exist as perfect and defect-free. In reality, secondary point-like defects are possible in the dislocation core. Moreover, “reconstruction defects” (RD) are introduced during reconstruction, such as anti-phase defect (APD), topological solitons, kinks and soliton-kink complexes. Among all the known defects the most important core defects are considered to be kinks, which control the mobility of dislocations at finite temperatures.

Nowadays the major source of the information about the structure and energetics of core defects is computer simulations, whereas experimental evidences are still scarce and limited by the current HREM resolution. So far all the reported ...

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