Handbook of Silicon Based MEMS Materials and Technologies

11.4. Physical Mechanisms of Fatigue of Silicon

11.4.1. General Remarks

Over the past decade, a vast array of MEMS applications, such as pressure transducers, inertial sensors, ink jet cartridge nozzles, and more have emerged and many commercial products ranging from medical to computing devices have entered the marketplace. The convenience and success of silicon material and micromachining technology have made silicon a natural choice for many MEMS applications, such as actuator, power generator, etc. The reliability of these applications is extremely important to ensure their effective performance (“high-performance” applications) and safeguarding human life (“safety-critical” applications). In particular, the materials used for the safety-critical ...