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Handbook of Silicon Based MEMS Materials and Technologies by Teruaki Motooka, Ari Lehto, Markku Tilli, Veikko Lindroos

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12.10. Further Effects of Electrostatic Nonlinearities from Applications Point of View

Electrostatic nonlinearities discussed earlier can generate harmful side-effects in capacitively coupled devices. In the following, these effects are studied in detail with respect to the two perhaps most promising application areas of MEMS-devices in RF-electronics which are filters and reference oscillators.

12.10.1. Case 1: Capacitively Coupled Filter

The narrow resonance of MEMS-resonators gives the possibility of using them as highly selective bandpass filters. With proper biasing, the input signals at the resonance frequency of the resonator will introduce a force that is amplified by the quality factor Q of the resonator and therefore the signals at ...

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