1. Koskenvuori M., Tittonen I., Alastalo A., IEEE Electron Device Lett. 28 2007, 970-972

2. N.W. Ashcroft, N.D. Mermin, Solid State Physics 1976 Holt, Rinehart and Winston Philadelphia

3. M. Sze, Semiconductor devices Second ed. 2002 John Wiley & Sons Ltd

4. W. Mönch, Semiconductor Surfaces and Interfaces 1995 Springer

5. T. Durakiewicz, A. Arko, J.J. Joyce, D.P. Moore, S. Halas, Thermal work function shifts for polycrystalline metal surfaces Surf. Sci. 478 2001, 72-82

6. H. Lüth, Surfaces and Interfaces of Solid Materials 1998 Springer

7. Koskenvuori M., Rytkönen V.-P., Rantakari P., Tittonen I., J. Phys. D: Appl. Phys. 40 2007, 5558-5563

8. A. Kärkkäinen, MEMS based voltage references, Helsinki University of Technology, ...

Get Handbook of Silicon Based MEMS Materials and Technologies now with the O’Reilly learning platform.

O’Reilly members experience books, live events, courses curated by job role, and more from O’Reilly and nearly 200 top publishers.