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Handbook of Silicon Based MEMS Materials and Technologies by Teruaki Motooka, Ari Lehto, Markku Tilli, Veikko Lindroos

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Chapter Fifteen. Introduction to Measuring MEMS

15.1. On MEMS Measurements

Silicon-based MEMS technology is a direct offspring of the much larger silicon-integrated circuit technology. The basic fabrication processes, as well as most of the tools and materials, are based on those developed for IC manufacturing. For this reason many of the measurement requirements and techniques are also common with the IC technology. However, the special properties of MEMS devices put a different emphasis on the importance of different parameters and therefore also on the measurement techniques needed. For instance, various electrical measurements are of much smaller importance in MEMS than for ICs. On the other hand, measurements of mechanical properties are ...

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