18.3. Perspective and Conclusion
18.3.1. Perspective
The mechanical nature of MEMS implies that the state of stress of MEMS devices is critical for their performance and reliability. These facts are critical for the longevity of any MEMS devices during service. As a result, the way to access the residual stresses generated during fabrication and the development of associated MEMS residual stress control techniques are important.
Due to the size limitation, this article can only provide a very brief introduction on the MEMS residual stress characterizations. There are more methods in MEMS stress characterization than introduced in this article. With the continuous growth of MEMS technology and new techniques, new requirements shall continuously ...
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