1. S. Rizvi, Handbook of Photomask Manufacturing Technology 2005 CRC

2. B.G. Eynon, B. Wu, Photomask Fabrication Technology 2005 McGraw-Hill

3. W.M. Moreau, Semiconductor Microlithography 1991 Plenum (3rd printing)

4. J.R. Sheats, Microlithography Science and Technology 1998 CRC

5. H.J. Levinson, Principles of Lithography second ed. 2005 SPIE Press Monograph vol. PM146

6. K. Suzuki, B.W. Smith, Microlithography: Science and Technology 2007 Marcel Dekker

7. A. del Campo, C. Greiner, SU-8: a photoresist for high aspect ratio and 3D submicron lithography J. Micromech. Microeng. 17 2007, R81-R95

8. H. Miyajima, M. Mehregany, High-aspect-ratio photolithography for MEMS applications J. Microelectromech. Syst. 4 1995, 220-229 ...

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