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Handbook of Silicon Based MEMS Materials and Technologies by Teruaki Motooka, Ari Lehto, Markku Tilli, Veikko Lindroos

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References

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3. D. Flandre, A.N. Nazarov, P.L.F. Hemment (Eds.), Porous silicon based SOI: history and prospects, in: Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment, NATO Science Series, vol. 185, Springer Netherlands, ISSN 1568–2609, 2004, pp. 53–64.

4. L.T. Canham, Appl. Phys. Lett. 57 1990, 1046-

5. V. Lehmann, U. Gösele, Porous Silicon Formation: a quantum wire effect Appl. Phys. Lett. 58 8 1991, 856-858

6. L. Canham (Ed.), Properties of porous silicon, in: emis Datareviews Series, ...

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