O'Reilly logo

Handbook of Silicon Based MEMS Materials and Technologies by Teruaki Motooka, Ari Lehto, Markku Tilli, Veikko Lindroos

Stay ahead with the world's most comprehensive technology and business learning platform.

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, tutorials, and more.

Start Free Trial

No credit card required

26.5. ALD Reactors

26.5.1. Process Requirements, Reactor Types

The basic requirement of an ALD reactor is to create conditions for the ALD process, to supply necessary reactants at the required reaction temperature, one at a time, into interaction with the substrate surface. A reaction cycle in an ALD process consists of at least two different reaction sequences separated by purge sequences. For high-quality ALD material a key property of a reactor is its ability for a strict separation of the process sequences. The reactor alone cannot guarantee qualified ALD material—the chemistry of the processes is exceedingly important, as well as proper handling of the chemicals. Favorable ALD chemistry assumes highly reactive reactants, resulting in a ...

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, interactive tutorials, and more.

Start Free Trial

No credit card required