Handbook of Silicon Based MEMS Materials and Technologies

27.8. Micro/Nanofabrication Ability of Glassy Thin Films

27.8.1. Three-Dimensional Microforming

Three-dimensional microforming of metallic glass thin films is mostly demonstrated by Hata and coworkers using the Zr–Al–Cu and Pd–Cu–Si glassy thin films deposited by sputtering technique [110–113]. MEMS conical spring actuators were fabricated by silicon micromachining combined with heating of patterned metallic glass thin films to a supercooled liquid state.

Figure 27.23 shows the lift-off process which fabricates planner spiral shape structures of thin-film metallic glass. Figure 27.23a–g shows the schematic view of the method used for viscous flow microforming of patterned glassy film. In this process, arched aluminum foils were placed between ...