28.3.2. Important Properties of Metals in MEMS Applications
28.3.2.1. Electrical Conductivity
It is clear that the electrical conductivity of semiconductors is not satisfactory for all needs of MEMS. The most prominent driver for MEMS based on good conductors is RF-MEMS. The insertion loss is at an acceptable level in several cases only if noble metals or aluminum are used. Aluminum is favoured if processing has to be completed in a waferfab compatible with active device (CMOS) integration; otherwise, gold or copper are good candidates. Electrical resistivities for some metals relevant in MEMS are listed in Table 28.1.
Table 28.1. Indicative properties of metals relevant in MEMS. values may vary in different sources and also differ for thin ...
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