O'Reilly logo

Handbook of Silicon Based MEMS Materials and Technologies by Teruaki Motooka, Ari Lehto, Markku Tilli, Veikko Lindroos

Stay ahead with the world's most comprehensive technology and business learning platform.

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, tutorials, and more.

Start Free Trial

No credit card required

Chapter Forty. Outgassing and Gettering

40.1. Introduction

Conventional packaging of microelectronic and optoelectronic devices is usually stable and not affected by the external environment except for a few specific cases. The high power semiconductor lasers at 980 nm are affected by the presence of moisture inside their hermetic package causing optical damages of their laser emitting facets. Hydrogen can weaken the Pd metallization of GaAs microwave power amplifiers packaged inside hermetic metallic packages. In both cases, a dryer and a thin film hydrogen getter respectively have been the practical way to guarantee a long lifetime and high reliability to these devices working under the oceans or on airplanes respectively. The evolution of ...

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, interactive tutorials, and more.

Start Free Trial

No credit card required