Handbook of Silicon Based MEMS Materials and Technologies

Appendix 2. Nanoindentation Characterization of Silicon and other MEMS Materials

Introduction

The very rapid and progressive process of miniaturization of electromechanical devices, which is appreciable over the last few decades, simultaneously demand a high standard for both materials and base components used in prefabrication process. The potential of integrating a MEMS (Micro Electro-Mechanical System) device together with a complete control of electric circuits implemented at individual chip, is nowadays one of the leading ideas in the field of micro- and nanoscale systems.

MEMS technology, which is commonly based on silicon material, either as fundamental constructive element or as an excellent substrate for other products of microfabrication ...