T. Ouchi, Canon Inc., Japan
This chapter describes two types of semiconductor based integrated devices which operate in the terahertz (THz) region. One is transmission line type on-chip THz sensors for biology. In this structure, two photoconductive switches of GaAs thin layers and microstrip line are integrated on one Si substrate. Marker-free DNA hybridization detection was achieved at the level of a few femto-moles. The other integrated device is an InGaAs/InAlAs triple-barrier resonant tunneling diode, with current injection operation integrated with a patch antenna which realized sub-terahertz oscillation at room temperature.
terahertz oscillator ...