Sputter deposition of large-area double-sided YBCO superconducting films
J. Xiong, B. Tao and Y. Li, University of Electronic Science and Technology of China, China
Abstract:
Research in the field of high-temperature superconducting films has progressed from the study of their basic chemistry and structure, to a point where an enormous range of desirable properties are being explored for device applications. This review focuses on the synthesis and properties of large-area double-sided YBa2Cu3O7 – δ (YBCO) films and thickness-dependent superconductivity.Double-sided YBCO thin films were prepared by sputter deposition. In order to achieve good performance and lateral homogeneity of large-area (up to 3-inch) films for multi-pole devices ...
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