Hybrid Micromachining and Microfabrication Technologies

7Laser-Assisted Hybrid Micromachining Processes and Its Applications

Ravindra Nath Yadav

BBD National Institute of Technology and Management, Lucknow, India

Abstract

Multifunctional properties of miniatures within limited space attract the attention of advanced industries to meet the current and futuristic demands. The fabrication of miniatures at micro/nanoscale is challenging for traditional processes because of size constraint and tool hardness more than workpiece. In existing nontraditional processes, laser is one of versatile shaping process that uses for fabrication of miniatures at micron and submicron scales with precise surface quality due to highly flexible nature with application of short and ultrafast lasers. Such lasers are broadly used in microfabrication of electrical, mechanical, and photonic devices for surface structuring. Even though, laser machining suffers with several drawbacks like spattering, burr formation, recast layer, and thermal stresses. Instead of this, dimensional control and straight cut profiles become challenging. To overcome these problems, laser is hybridized with other processes (traditional/nontraditional) referred as laser-assisted hybrid processes. Generally, performances of hybrid processes are better than the individual one at similar conditions. In present chapter, the various laser-based hybridized processes are discussed with their applicability for shaping of materials at micron/submicron level. Here, laser is considered as energy ...