Hybrid Micromachining and Microfabrication Technologies

11Micro Turbine Generator Combined with Silicon Structure and Ceramic Magnetic Circuit

Minami Kaneko* and Fumio Uchikoba

College of Science and Technology, Nihon University, Chiba, Japan

Abstract

With the advent of the Internet of Things (IoT) society, demand for miniature power generator to drive communication devices and sensors of IoT module is increasing. Energy-harvesting generators are being actively researched; however, each of these technologies has its own problems to solve with a single fabrication technology. In the case of thermal cycles that use waste heat, organic Rankine cycle power generation systems have been developed that can use lower-grade heat by changing the conventional working fluid to a low boiling point material. However, these systems are based on machining process. In this research, a miniature electromagnetic induction type generator by combining the microelectromechanical systems (MEMS) process, a microfabrication technology, and the multilayer ceramic technology, a miniature electronic components fabrication technology was developed. The result was an output of 3 mVA in a size of less than 10 mm square. In addition, the rotational behavior and phase change of the turbine were observed as the result of using a low boiling point material as the working fluid for the purpose of waste heat harvesting. The results suggest the usefulness of combining different fabrication techniques and materials in realizing miniature power generation systems.

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